Dec 01, 2009 06:16:41 AM Residual Gas Analyzer Software RGA Software Version, 3.005 Pressure vs Time Scan Setup: Active channels in Scan, 1 Units, Amps Sample Period, 1.00, sec Focus Voltage, 90, Volts Ion Energy, HIGH Electron Energy, 70, eV CEM Voltage, 2205, Volts CEM Gain, 1.91E+002 Sensitivity Factor, 1.04E-003 Filament Current, 1.00, mAmps Focus Voltage, 90, Volts Ion Energy, HIGH Electron Energy, 70, eV CEM Voltage, 2205, Volts CEM Gain, 1.91E+002 Sensitivity Factor, 1.04E-003 Filament Current, 1.00, mAmps Start time, Dec 01, 2009 06:16:41 AM Channel, Mass(amu), Name, Cal Factor, Noise Floor, CEM Status 1 40 Argon 1.00 3 ON Time(s) Channel#1 0 6.37e-015 0.985 3.07e-015 1.985 4.99e-015 2.985 1.53e-015 3.985 1.58e-015 4.985 1.07e-015 5.985 1.91e-015 7 1.37e-015 8 3.46e-015 9.016 1.49e-015 10.03 2.64e-015 11.05 2.12e-015 12.05 4.65e-015 13.06 2.97e-015 14.06 2.54e-015 15.06 2.16e-015 16.06 2.94e-015 17.06 2.61e-015 18.06 3.02e-015 19.06 3.12e-015 20.08 2.86e-015 21.06 3.22e-015 22.06 3.43e-015 23.06 3.65e-015 24.06 2.81e-015 25.06 2.63e-015 26.06 6.86e-010 27.08 1.30e-012 28.06 1.54e-014 29.06 1.46e-014 30.06 8.49e-015 31.06 2.10e-014 32.06 2.74e-014 33.06 1.85e-014 34.06 2.16e-014 35.06 1.00e-014 36.06 1.87e-014 37.06 8.59e-015 38.06 2.13e-014 39.06 1.00e-014 40.06 1.26e-014 41.06 1.67e-014 42.06 1.34e-014 43.06 7.57e-015 44.06 1.38e-014 45.06 1.58e-014 46.06 1.08e-014 47.06 1.16e-014 48.06 1.30e-014 49.06 1.05e-014 50.06 1.45e-014 51.06 8.04e-015 52.06 1.27e-014 53.06 7.93e-015 54.08 2.26e-015 55.06 3.71e-015 56.06 4.47e-015 57.06 2.00e-015 58.06 3.39e-015 59.06 3.59e-015 60.06 2.48e-015 61.06 2.93e-015 62.06 2.88e-015 63.08 2.92e-015 64.06 3.88e-015 65.06 2.40e-015 66.06 2.31e-015 67.06 2.68e-015 68.06 3.24e-015 69.06 1.39e-015 70.06 2.83e-015 71.06 2.41e-015 72.06 1.64e-015 73.06 3.05e-015 74.06 1.52e-015 75.06 2.92e-015 76.06 2.43e-015 77.06 2.51e-015 78.06 2.71e-015 79.08 2.65e-015 80.06 1.91e-015 81.06 2.47e-015 82.06 3.07e-015